VACU-IND-600 Heavy-Duty Dry Screw Vacuum Pump, 600 m³/h, 0.005 mbar, 37kW, ATEX Zone 2, ISO 8573-1 Class 0

VACU-IND-600 Heavy-Duty Dry Screw Vacuum Pump, 600 m³/h, 0.005 mbar, 37kW, ATEX Zone 2, ISO 8573-1 Class 0

The VACU-IND-600 is a high-performance heavy duty dry vacuum pump engineered for continuous industrial operation in demanding environments. Designed for ultimate reliability and contamination-free performance, this 600 m³/h screw pump delivers exceptional pumping speed with ultimate vacuum down to 0.005 mbar, making it ideal for processes requiring ultra-clean, oil-free vacuum. Certified as an ATEX vacuum pump for Zone 2 hazardous areas, it meets stringent safety standards for explosive atmospheres. Its ISO 8573-1 Class 0 air certification guarantees zero risk of hydrocarbon contamination — critical for semiconductor manufacturing, pharmaceutical processing, and high-purity coating applications.

Overview

Overview

Product Overview

Featuring a robust twin-screw rotor design with precision-machined, PTFE-coated rotors and advanced internal cooling, the VACU-IND-600 ensures minimal thermal drift and extended service life—even under 24/7 duty cycles. Integrated variable-frequency drive (VFD), intelligent pressure control, and real-time diagnostics enable seamless integration into automated production lines and Industry 4.0-ready facilities.

Key Features

Oil-free, dry compression technology — zero lubricant carryover
ATEX II 3G Ex ec IIC T4 Gc certified for Zone 2 gas atmospheres
ISO 8573-1 Class 0 compliant — guaranteed particle- and oil-free exhaust air
Integrated VFD and PLC-compatible communication (Modbus RTU & Profibus optional)
High-efficiency IE3 motor (37 kW) with low-noise, forced-air cooling
Corrosion-resistant cast iron housing with epoxy-painted finish
Self-diagnostic HMI touchscreen interface with event logging

Technical Specifications

Parameter	Value
Model	VACU-IND-600
Technology	Dry Twin-Screw
Max. Pumping Speed (at 50 Hz)	600 m³/h
Ultimate Vacuum Pressure	0.005 mbar (absolute)
Motor Power	37 kW (IE3, 400 V / 50 Hz)
Speed Range	500–3000 rpm (VFD-controlled)
Weight	1,280 kg
Cooling Method	Forced-air + internal water-cooled jacket (optional)
Noise Level (1 m)	≤72 dB(A)
Inlet Flange	DN 200 (ISO-KF or ANSI 3" RF)
ATEX Certification	II 3G Ex ec IIC T4 Gc
ISO 8573-1 Class	0 (for particles, water, oil)

Applications

This heavy duty dry vacuum pump is widely deployed across industries where purity, safety, and uptime are non-negotiable: semiconductor wafer handling and PVD/CVD chambers; sterile pharmaceutical freeze-drying and lyophilization; aerospace composite curing ovens; lithium-ion battery electrode drying; and chemical vapor deposition in R&D labs. As a certified ATEX vacuum pump and Class 0 air solution, it’s the preferred choice for explosion-risk zones and ultra-high-purity process vacuum systems requiring a 600 m³/h screw pump with zero hydrocarbon exposure.